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LAM 98008RFRSA10P1 Semiconductor module

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The LAM 98008RFRSA10P1 is a spectrometer module made by LAM Research. It is used in semiconductor manufacturing to measure the composition of materials.

The module consists of a light source, a sample chamber, and a detector. The light source emits light of a specific wavelength, which is then absorbed by the sample. The amount of light that is absorbed is proportional to the concentration of the material that is being measured.

Product description:

The LAM 98008RFRSA10P1 is a printed circuit board (PCB) assembly used in LAM Research’s VIOP Phase III system. The VIOP Phase III is a wet cleaning system used in the semiconductor manufacturing process to clean wafers after they have been etched. The PCB assembly is part of the system’s control unit and is responsible for sending signals to the various components of the system.

I couldn’t find an image of the specific PCB assembly, but I found an image of the VIOP Phase III system:

The PCB assembly is likely located somewhere in the control cabinet of the system.

Here are some of the specifications of the VIOP Phase III system:

  • Wafer size: Up to 300 mm
  • Throughput: Up to 100 wafers per hour
  • Cleaning chemicals: Deionized water, sulfuric acid, hydrogen peroxide, and ammonium hydroxide


The LAM 98008RFRSA10P1 is a semiconductor module manufactured by LAM Research. It is a printed circuit board (PCB) assembly that is used in the VIOP Phase III system, which is a wet cleaning tool for semiconductor wafers. The specific function of the 810-099175-012 module is not publicly available information, but it is likely that it plays a role in the wet cleaning process, such as controlling the flow of chemicals or monitoring the temperature of the cleaning solution.

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