Zygo ZMI-4004 8020-0102-02

Zygo ZMI-4004 Overview

The Zygo ZMI-4004 is a 4-axis VME64x measurement board in the Zygo ZMI series, designed for high-precision displacement and distance measurement. It is widely used in semiconductor manufacturing, optical fabrication, and scientific research applications that demand sub-nanometer resolution.

This board adopts the 6U VME electronic format, supports simultaneous 4-axis measurement, and offers a resolution of up to 0.15 nm. It achieves a maximum velocity of ±2.55 m/s, a data rate of 10 MHz, and a data age uncertainty of only ±0.1 ns. With built-in error compensation, the ZMI-4004 can seamlessly interface with Zygo laser heads such as 7712 and 7702, as well as the ZMI series interferometers.

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Technical Highlights

Feature	Description
Electronic Platform	6U VME64x, compatible with standard high-speed VME bus
Axes	4 axes per board, ideal for compact multi-axis integration
Resolution	0.31 nm (single-channel), 0.15 nm (dual-channel)
Velocity	5.1 m/s (single-channel), 2.55 m/s (dual-channel)
Data Rate	10 MHz; supports both parallel VME and high-speed serial formats
Error Compensation	Built-in cyclic error compensation for improved dynamic accuracy
Compatible Laser Heads	Zygo 7712, 7702, 7714, 7724, etc.

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Typical Applications

• Semiconductor Lithography & Etching – Provides high-resolution displacement feedback to improve overlay accuracy.
• Precision Manufacturing & Metrology – Enables sub-nanometer positioning for optical components and MEMS fabrication.
• Scientific Research – Suitable for ultra-precise motion stages and nanopositioning experimental setups.

Main brand :

ABB       Allen-Bradley      Alstom      Bently        GE        MOOG 

Schneider   Woodward   HIMA   Honeywell   Emerson   Foxboro

First hand source, affordable price. Spot inventory!

•Shipping Port: Xiamen

•Ship to you via Fedex/DHL/TNT/UPS/EMS

•Package: Original packing with cartons

Our Main Brands

DCS/PLC/TSI Manufacturers:
ABB, GE, Allen Bradley, Honeywell, Emerson, Bently Nevada, Prosoft, Siemens, Westinghouse, Triconex, Foxboro, ICS Triplex, Hima, Schneider, Yokogawa, Woodward, B&R, KEBA, etc.

Product Categories & Models

1. Distributed Control System (DCS)

• ABB:3AUA0000110429, SYSCON2 746924
• Invensys Foxboro:FBM214, FBM242, B0123HE
• Invensys Triconex:3625, 3700A, 3604E
• Woodward:5462-758B
• HIMA:F2-DO-16-02, F8650E
• Yokogawa:SAI143-S03 S1, F9342L-02
• Honeywell:51402497-200, 51403519-160, 51199194-100, CC-PDO801
• Emerson:KJ4001X1-NB1, 12P3368X012

2. Programmable Logic Controller (PLC)

• Rockwell/Allen Bradley:1734-IB8, 1734-OB8, 1769-L18ER-BB1B, 1756-IM16I
• ICS Triplex:T8461, T8850, T8403, T8431, T8831, T8310
• Schneider Modicon:140DDI85300
• GE Fanuc:IS210AEPSG2B, IS220UCSAH1A, IS215ACLEH1A, IS210AEAAH1B
• Siemens:6ES7331-1KF02-0AB0
• Prosoft:MVI46-DFNT
• Bachmann:MPC240
• Woodhead:9905-068 2301A

3. Turbine Supervisory Instrumentation (TSI)

• Bently Nevada:3500/22M, 138607-01, 3500/25, 3500/53, 3500/32M 149986-02
• EPRO:MMS6110, MMS6120, MMS6220, MMS6312, MMS6410, 6423, 6424
• ENTEK:EK C6622HS, XM124, 1440-SDM02-01RA

Frequently Asked Questions 

1.What is the delivery lead time?
The delivery time varies depending on the order volume and product type. Typically, standard products are delivered within 7-15 working days, while customized products may require longer processing times. The exact delivery schedule can be confirmed when the order is placed.

2.How can I track the status of my order?
We provide real-time logistics tracking services. Customers can track their shipments at any time using the provided tracking number to ensure timely delivery.

3.Do you offer international shipping?
Yes, we have an established international logistics network and can deliver products safely and efficiently worldwide via sea freight, air freight, and other shipping methods.

4.Are your products environmentally friendly?
Our products comply with international environmental standards. We use eco-friendly materials and follow sustainability principles to minimize the environmental impact of production and usage.

5.Do you provide after-sales services?
Yes, we offer comprehensive after-sales services, including handling product quality issues, providing technical support, and offering maintenance services. Our after-sales team is available to assist you whenever needed.

6.What is the minimum order quantity?
The minimum order quantity depends on the product type. Please contact our sales team for more details so we can provide accurate order requirements.

7.What is the product warranty period?
The warranty period for our products is generally one year, though it may vary for different products. Detailed warranty terms can be confirmed when making a purchase.

8.How can I contact customer service?
You can reach our customer service team via phone, email, or online chat. Our team is ready to assist you with any inquiries or support needs.