Lam Research GAS BOX 571-065780-76178B — Overview
The part you asked about is a Lam Research Jetstream / All-in-One Gas Box assembly used inside semiconductor etch / ash equipment. The suffix 76178B is typically a configuration or revision code for a specific tool setup (often tied to chamber option, gas line configuration, or factory integration kit).
What this Gas Box is
The 571-065780 series is a process gas delivery & distribution module used in Lam etch systems.
In Lam tools, the gas box is the central gas panel that:
- Receives process gases from facility supply
- Regulates pressure and flow
- Distributes gases to the process chamber safely and precisely
These gas boxes are commonly used in:
- Lam TCP / Kiyo / Exelan / Flex / 2300 series etchers
- Plasma etch & photoresist ashing processes
Gas delivery systems like this are essential because semiconductor plasma processes require precise gas mixing, flow control, and safety interlocks.
Typical configuration of the 571-065780 family
Based on listings and teardown descriptions of nearby part numbers (702 / 703 etc.), this gas box typically includes:
Core modules inside the gas box
- Multiple Mass Flow Controllers (MFCs)
- Pneumatic & proportional control valves
- Gas mixing manifold
- Pressure regulators
- Filters and purge lines
- Safety interlocks and leak detection ports
- Exhaust routing
Main brand :
ABB Allen-Bradley Alstom Bently Emerson Foxboro
GE MOOG Schneider Woodward HIMA Honeywell
First hand source, affordable price. Spot inventory!
•Shipping Port: Xiamen
•Ship to you via Fedex/DHL/TNT/UPS/EMS
•Package: Original packing with cartons
Q&A of our advantages:
Q: What is our primary advantage in product availability?
A: Our offers a wide range of industrial automation products with a high level of availability, ensuring quick delivery and minimal downtime.
Q: How does our ensure competitive pricing?
A: Our provides competitive pricing by leveraging strong supplier relationships and optimizing its supply chain.
Q: What sets our customer service apart?
A: Our customer service is distinguished by its knowledgeable support team and commitment to providing timely and effective solutions.
Q: How does our handle product quality?
A: Our ensures product quality through rigorous testing and quality control processes, backed by reliable manufacturer partnerships.
Q: Can our assist with obsolete or hard-to-find components?
A: Yes, our specializes in sourcing obsolete and hard-to-find components, helping customers maintain and upgrade their systems.
Welcome to inquiry,my friend!
About us
Xiamen Xingruijia Import and Export Co., Ltd. adheres to the corporate philosophy of “integrity, professionalism, and innovation”, focuses on customer satisfaction, and constantly pursues excellence.
We always adhere to the principle of putting people first, cultivating a high-quality workforce, and providing customers with the highest quality services. In the future, we will continue to deeply cultivate the field of industrial automation, continuously expand our product line, improve our service level, and create greater value for our customers.
- 10+years of industry experience
- Authorized agents for numerous well-known brands
- Rich product line covering multiple industries
- Professional technical team, providing comprehensive services
- A comprehensive after-sales service system to safeguard customer rights and interests
There are no reviews yet.