Lam Research GAS BOX 571-065780-76178A — Overview
Product Overview
Lam Research Gas Box 571-065780-76178A is an integrated process gas delivery module used inside Lam semiconductor etch / deposition platforms (commonly 2300 series and similar process chambers).
A “Gas Box” in Lam tools is a high-precision gas distribution and safety subsystem responsible for delivering process gases to the chamber under strict flow, pressure, and safety control.
Gas boxes with similar base P/N 571-065780-xxxx are confirmed as All-in-One Gas Box assemblies used on Lam etchers.
Main Function in Semiconductor Tools
The Gas Box is part of the Gas Delivery System (GDS) and performs:
- Process gas routing and distribution
- Mass Flow Control (MFC) integration
- Pressure regulation
- Purge / vent / pump sequencing
- Leak detection and safety interlock
- Gas isolation for maintenance and chamber protection
These modules ensure stable and repeatable plasma processing, which is critical for wafer fabrication.
Typical Supported Process Gases
Based on Lam gas-box configurations for etch systems, the gas lines typically support fluorine, chlorine, and inert gases such as:
- Cl₂, BCl₃
- CF₄, CHF₃, CH₂F₂, C₂H₄
- SF₆, NF₃
- O₂, N₂, H₂
- Ar, He
These are standard gases used in plasma etching and chamber cleaning processes.
Key Components Inside the Gas Box
A typical Lam All-in-One Gas Box contains:
Gas Control Hardware
- Mass Flow Controllers (MFCs)
- Pneumatic valves / isolation valves
- Pressure transducers
- Filters and purifiers
- Gas line manifolds
Electrical & Control
- PCB control boards
- Interlock circuits
- Communication interface to tool controller
Safety Features
- Automatic shutoff valves
- Purge sequences (N₂)
- Leak detection routing
- Exhaust integration
Typical Applications
Used in Lam platforms for:
- Plasma Etch (Dielectric / Conductor / Poly)
- Chamber Clean (NF3 remote plasma clean)
- PECVD / CVD gas delivery
- Advanced packaging and memory fabrication
Lam process tools support a wide range of semiconductor applications such as advanced packaging, memory, and transistor fabrication.
Main brand :
ABB Allen-Bradley Alstom Bently Emerson Foxboro
GE MOOG Schneider Woodward HIMA Honeywell
First hand source, affordable price. Spot inventory!
•Shipping Port: Xiamen
•Ship to you via Fedex/DHL/TNT/UPS/EMS
•Package: Original packing with cartons
Q&A of our advantages:
Q: What is our primary advantage in product availability?
A: Our offers a wide range of industrial automation products with a high level of availability, ensuring quick delivery and minimal downtime.
Q: How does our ensure competitive pricing?
A: Our provides competitive pricing by leveraging strong supplier relationships and optimizing its supply chain.
Q: What sets our customer service apart?
A: Our customer service is distinguished by its knowledgeable support team and commitment to providing timely and effective solutions.
Q: How does our handle product quality?
A: Our ensures product quality through rigorous testing and quality control processes, backed by reliable manufacturer partnerships.
Q: Can our assist with obsolete or hard-to-find components?
A: Yes, our specializes in sourcing obsolete and hard-to-find components, helping customers maintain and upgrade their systems.
Welcome to inquiry,my friend!
About us
Xiamen Xingruijia Import and Export Co., Ltd. adheres to the corporate philosophy of “integrity, professionalism, and innovation”, focuses on customer satisfaction, and constantly pursues excellence.
We always adhere to the principle of putting people first, cultivating a high-quality workforce, and providing customers with the highest quality services. In the future, we will continue to deeply cultivate the field of industrial automation, continuously expand our product line, improve our service level, and create greater value for our customers.
- 10+years of industry experience
- Authorized agents for numerous well-known brands
- Rich product line covering multiple industries
- Professional technical team, providing comprehensive services
- A comprehensive after-sales service system to safeguard customer rights and interests
There are no reviews yet.