Lam Research 853-260130-200 853-A64996-002

Lam Research Semiconductor Equipment Spare Parts Overview

Product Summary

Lam Research 853-260130-200 and 853-A64996-002 are OEM spare parts used in Lam Research wafer fabrication equipment. These components are typically installed in plasma etch, deposition, strip, or clean platforms to ensure stable process performance, RF delivery, and system reliability.

Lam Research equipment supports advanced semiconductor manufacturing processes such as etch, deposition, wet clean, strip, and plating for logic, memory, and advanced packaging applications.

Key Functions

These part numbers are commonly associated with electrical/RF or control assemblies used inside Lam process modules. Their typical roles include:

Supporting RF power delivery and plasma control
Ensuring stable tool communication and signal integrity
Maintaining process repeatability and equipment uptime
Serving as replacement modules for preventive maintenance

Such assemblies are critical to keep semiconductor tools running within OEM specifications and avoid production downtime.

Typical Equipment Compatibility

These parts are used across multiple Lam Research platforms, including:

Plasma etch systems
Dielectric / conductor etch tools
Photoresist strip & clean tools
Deposition and advanced packaging equipment

They are often found in platforms such as:

Lam 2300 series
Lam Rainbow / Exelan platforms
Lam Kiyo / Flex / Versys families

Applications in Semiconductor Manufacturing

Lam Research tools are widely used in:

Logic and foundry manufacturing
NAND and DRAM memory production
Advanced packaging and interconnect processing
Power devices and analog IC fabrication

These spare parts help ensure process stability, yield improvement, and tool lifecycle extension.

Key Benefits

OEM-grade compatibility with Lam equipment
High reliability for critical process modules
Supports preventive maintenance programs
Helps reduce unexpected downtime
Extends tool service life

Lam Research 853-260130-200 853-A64996-002

Main brand :

ABB Allen-Bradley Alstom Bently Emerson Foxboro

GE MOOG Schneider Woodward HIMA Honeywell

First hand source, affordable price. Spot inventory!

•Shipping Port: Xiamen

•Ship to you via Fedex/DHL/TNT/UPS/EMS

•Package: Original packing with cartons

Q&A of our advantages:

Q: What is our primary advantage in product availability?
A: Our offers a wide range of industrial automation products with a high level of availability, ensuring quick delivery and minimal downtime.

Q: How does our ensure competitive pricing?
A: Our provides competitive pricing by leveraging strong supplier relationships and optimizing its supply chain.

Q: What sets our customer service apart?
A: Our customer service is distinguished by its knowledgeable support team and commitment to providing timely and effective solutions.

Q: How does our handle product quality?
A: Our ensures product quality through rigorous testing and quality control processes, backed by reliable manufacturer partnerships.

Q: Can our assist with obsolete or hard-to-find components?
A: Yes, our specializes in sourcing obsolete and hard-to-find components, helping customers maintain and upgrade their systems.