Lam Research 839-017892-201 / 853-017892-201

These are Lam Research semiconductor equipment spare parts. Based on available industry references and Lam’s product ecosystem, this paired number format typically indicates assembly + revision/variant part numbers used inside Lam wafer fabrication systems (etch, deposition, clean, or strip platforms).

Basic identification

• Manufacturer: Lam Research
• Part numbers:
  • 839-017892-201
  • 853-017892-201
• Category: OEM semiconductor equipment spare parts
• Typical usage: Installed inside Lam process tools (etch / clean / deposition / strip platforms)

In Lam’s numbering logic:

• 839-xxxxx → Often refers to assembly / sub-assembly / module
• 853-xxxxx → Often refers to service replacement / upgraded or matched spare for the same assembly

So these two numbers are usually paired service parts (original assembly + replacement/service version).

Likely application inside Lam equipment

Lam Research tools are used in critical wafer fabrication steps such as:

• Plasma etch
• Wafer cleaning
• Dry resist and patterning
• Deposition and strip processes

These processes are core to advanced chip manufacturing.

Parts in the 83x / 85x series commonly belong to:

• RF or power delivery modules
• Gas / vacuum / fluid control assemblies
• Sensor or control interface boards
• Chamber hardware assemblies
• Motion / temperature / safety sub-systems

These components support high-precision process control and system uptime, which are critical in modern semiconductor fabs.

Typical equipment platforms using similar parts

These spare parts are commonly found in Lam platforms such as:

• Lam 2300 etch systems
• Lam Kiyo / Flex / Versys / Reliant platforms
• Lam Clean / Strip systems (EOS, etc.)
• 300mm wafer processing tools

Lam tools are designed to achieve high throughput, defect reduction, and process uniformity for advanced semiconductor nodes.

Why these parts are important

In semiconductor fabs, such spare parts are used for:

• Preventive maintenance (PM kits)
• Corrective maintenance (CM replacement)
• Tool uptime and yield protection
• Matching OEM performance specifications

Using the exact Lam OEM part numbers ensures:

• Compatibility with tool firmware and recipes
• Stable process repeatability
• Reduced risk of wafer scrap or downtime

Short SEO-style description (ready for website)

Lam Research 839-017892-201 / 853-017892-201 are OEM semiconductor equipment spare parts used in Lam wafer fabrication systems. These service replacement components support critical process modules, helping maintain tool stability, uptime, and process accuracy in advanced semiconductor manufacturing environments.

Main brand :

ABB     Allen-Bradley     Alstom     Bently      Emerson     Foxboro

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•Ship to you via Fedex/DHL/TNT/UPS/EMS

•Package: Original packing with cartons

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