Lam Research 16-LINE IGS GAS BOX 571-033051-004 / 571-033051-13589B1
Lam Research 16-LINE IGS GAS BOX
Part Number: 571-033051-004 / 571-033051-13589B1
Manufacturer: Lam Research
Type: Integrated Gas System (IGS) Gas Box
Product Overview
The Lam Research 16-Line IGS Gas Box is a semiconductor process gas delivery module designed for precise, safe, and reliable distribution of multiple specialty gases used in wafer fabrication. It is typically integrated into Lam etch or deposition equipment to control gas flow, pressure, filtration, and safety interlocks.
IGS gas boxes are critical subsystems in fab environments where high-purity gas control and safety compliance are required.
Gas boxes in this series are widely used in semiconductor manufacturing for maintaining stable process conditions and repeatable wafer processing performance.
Key Functions
• Centralized control of multiple process gases (16 gas lines)
• Precision mass flow and pressure regulation
• Integrated safety interlocks and monitoring
• High-purity gas filtration and leak-tight architecture
• Interface with tool PLC / equipment control systems
These systems are designed to provide reliable and precise gas flow control for semiconductor processes, ensuring stable and high-quality results.
Typical Internal Components
(Exact configuration varies by suffix revision such as -004 / -13589B1)
Common components found in 16-line IGS gas boxes include:
- Mass Flow Controllers (MFCs)
- Pneumatic solenoid valve arrays
- Pressure transducers and switches
- Gas line filters
- Control PCBs and wiring harnesses
- VCR/VCO gas manifold assemblies
Similar models list dozens of solenoid valves, filters, and MFCs integrated inside the enclosure.
Application
Used in semiconductor fabrication equipment for:
- Plasma etch systems
- CVD / PECVD tools
- Dielectric / conductor processing
- Advanced node wafer manufacturing
The gas box ensures accurate mixing, switching, and delivery of specialty gases such as CF₄, O₂, He, SF₆ and others depending on tool configuration.
Key Advantages
✔ High-precision gas control
✔ Multi-gas capability (16 lines)
✔ Cleanroom-ready high-purity design
✔ Reliable for 24/7 fab operation
✔ Modular and serviceable subsystem
Main brand :
ABB Allen-Bradley Alstom Bently Emerson Foxboro
GE MOOG Schneider Woodward HIMA Honeywell
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